Invention Grant
US09512540B2 Method for manufacturing N-type SiC single crystal by solution growth using a mixed gas atmosphere
有权
使用混合气体气氛通过溶液生长制造N型SiC单晶的方法
- Patent Title: Method for manufacturing N-type SiC single crystal by solution growth using a mixed gas atmosphere
- Patent Title (中): 使用混合气体气氛通过溶液生长制造N型SiC单晶的方法
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Application No.: US13883350Application Date: 2011-11-04
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Publication No.: US09512540B2Publication Date: 2016-12-06
- Inventor: Kazuhiko Kusunoki , Kazuhito Kamei , Nobuyoshi Yashiro , Kouji Moriguchi , Nobuhiro Okada , Katsunori Danno , Hironori Daikoku
- Applicant: Kazuhiko Kusunoki , Kazuhito Kamei , Nobuyoshi Yashiro , Kouji Moriguchi , Nobuhiro Okada , Katsunori Danno , Hironori Daikoku
- Applicant Address: JP Tokyo JP Aichi-ken
- Assignee: NIPPON STEEL & SUMITOMO METAL CORPORATION,TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee: NIPPON STEEL & SUMITOMO METAL CORPORATION,TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo JP Aichi-ken
- Agency: Clark & Brody
- Priority: JP2010-250492 20101109
- International Application: PCT/JP2011/075483 WO 20111104
- International Announcement: WO2012/063743 WO 20120518
- Main IPC: C30B15/20
- IPC: C30B15/20 ; C30B17/00 ; C30B19/02 ; C30B29/36 ; C30B15/10 ; C30B15/30 ; C30B15/36

Abstract:
A method for manufacturing an n-type SiC single crystal, enables the suppression of the variation in nitrogen concentration among a plurality of n-type SiC single crystal ingots manufactured. A method includes the steps of: providing a manufacturing apparatus (100) including a chamber (1) having an area in which a crucible (7) is to be disposed; heating the area in which the crucible (7) is to be disposed and evacuating the gas in the chamber (1); filling, after the evacuation, the chamber (1) with a mixed gas containing a noble gas and nitrogen gas; heating and melting a starting material housed in the crucible (7) disposed in the area to produce a SiC solution (8) containing silicon and carbon; and immersing a SiC seed crystal into the SiC solution under the mixed gas atmosphere to grow an n-type SiC single crystal on the SiC seed crystal.
Public/Granted literature
- US20130220212A1 METHOD FOR MANUFACTURING N-TYPE SiC SINGLE CRYSTAL Public/Granted day:2013-08-29
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