Invention Grant
US09494483B2 Measuring system for measuring an imaging quality of an EUV lens 有权
用于测量EUV镜头成像质量的测量系统

Measuring system for measuring an imaging quality of an EUV lens
Abstract:
A measuring system (10) for measuring an imaging quality of an EUV lens (30) includes a diffractive test structure (26), a measurement light radiating device (16) which is configured to radiate measurement light (21) in the EUV wavelength range onto the test structure, a variation device (28) for varying at least one image-determining parameter of an imaging of the test structure that is effected by a lens, a detector (14) for recording an image stack including a plurality of images generated with different image-determining parameters being set, and an evaluation device (15) which is configured to determine the imaging quality of the lens from the image stack.
Public/Granted literature
Information query
Patent Agency Ranking
0/0