发明授权
- 专利标题: Low voltage transistor and logic devices with multiple, stacked piezoelectronic layers
- 专利标题(中): 低压晶体管和具有多个堆叠压电层的逻辑器件
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申请号: US15131484申请日: 2016-04-18
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公开(公告)号: US09466781B2公开(公告)日: 2016-10-11
- 发明人: Bruce G. Elmegreen , Glenn J. Martyna , Dennis M. Newns
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Vazken Alexanian
- 主分类号: H01L29/84
- IPC分类号: H01L29/84 ; H01L41/107 ; H01L41/083 ; H01L41/047 ; H01L41/187
摘要:
A piezoelectronic transistor device includes a first piezoelectric (PE) layer, a second PE layer, and a piezoresistive (PR) layer arranged in a stacked configuration, wherein an electrical resistance of the PR layer is dependent upon an applied voltage across the first and second PE layers by an applied pressure to the PR layer by the first and second PE layers. A piezoelectronic logic device includes a first and second piezoelectric transistor (PET), wherein the first and second PE layers of the first PET have a smaller cross sectional area than those of the second PET, such that a voltage drop across the PE layers of the first PET creates a first pressure in the PR layer of the first PET that is smaller than a second pressure in the PR layer of the second PET created by the same voltage drop across the PE layers of the second PET.
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