A cleaning apparatus for cleaning articles is proposed. The cleaning apparatus comprises at least one cleaning chamber for receiving the articles. The cleaning apparatus comprises, in the cleaning chamber, at least one fluid source for subjecting the articles to the action of at least one cleaning fluid. The cleaning apparatus furthermore comprises at least one plasma source, which is designed to ignite at least one plasma in at least one gas and to generate at least one reactive gas. The cleaning apparatus is designed to bring the reactive gas into contact with the articles, at least in part.