发明授权
- 专利标题: Film edge detecting method and film edge detecting device
- 专利标题(中): 胶片边缘检测方法和胶片边缘检测装置
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申请号: US14548997申请日: 2014-11-20
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公开(公告)号: US09410897B2公开(公告)日: 2016-08-09
- 发明人: Shoukun Wang , Huibin Guo , Yuchun Feng , Liangliang Li , Xiaoxiang Zhang , Zongjie Guo
- 申请人: BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- 申请人地址: CN Beijing CN Beijing
- 专利权人: BOE Technology Group Co., Ltd.,Beijing BOE Display Technology Co., Ltd.
- 当前专利权人: BOE Technology Group Co., Ltd.,Beijing BOE Display Technology Co., Ltd.
- 当前专利权人地址: CN Beijing CN Beijing
- 代理机构: Nath, Goldberg & Meyer
- 代理商 Joshua B. Goldberg
- 优先权: CN201410287383 20140624
- 主分类号: G01B11/14
- IPC分类号: G01B11/14 ; G01N21/84 ; G01B11/00 ; G01N21/88 ; G01B11/24
摘要:
The present invention provides a film edge detecting method and a film edge detecting device. The film edge detecting method is used for detecting a film edge of a film layer formed on a substrate, the film layer comprises a patterned film layer, the method includes: forming at least one scale pattern in the patterned film layer, a film edge of the patterned film layer corresponding to an edge of the scale pattern; obtaining a patterned film edge indication value of the edge of the scale pattern; and obtaining a second distance, which is a distance between the film edge of the non-patterned film layer and a corresponding edge of the substrate, based on the non-patterned film edge indication value and a preset reference value of the corresponding edge of the substrate.
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