发明授权
- 专利标题: Mask
- 专利标题(中): 面具
-
申请号: US14546237申请日: 2014-11-18
-
公开(公告)号: US09409204B2公开(公告)日: 2016-08-09
- 发明人: Jian Guo
- 申请人: BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 申请人地址: CN Beijing CN Beijing
- 专利权人: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 当前专利权人: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 当前专利权人地址: CN Beijing CN Beijing
- 代理机构: Nath, Goldberg & Meyer
- 代理商 Joshua B. Goldberg; Christopher Thomas
- 优先权: CN201410216482 20140521
- 主分类号: B05C21/00
- IPC分类号: B05C21/00 ; H01L21/308 ; G03F1/42 ; G03F1/70 ; G03F1/44
摘要:
The present invention provides a mask, on which a preset pattern is provided. First test patterns for determining an amount of a position offset of the mask during its movement are provided on the mask at a first side of the preset pattern and a second side of the preset pattern opposite to the first side, respectively. When being moved in a direction from the first side to the second side by a standard distance, the mask can determine whether a position offset occurs to the mask during its movement, and determine an amount of the position offset if a position offset occurs. Thus, the position offset of the mask can be corrected, thereby obtaining an accurate predetermined pattern on a glass substrate.
公开/授权文献
- US20150336129A1 MASK 公开/授权日:2015-11-26
信息查询