发明授权
US09399813B2 TiAgN coating layer, TiAgN coating method and TiAgN coating apparatus
有权
TiAgN涂层，TiAgN涂层法，TiAgN涂层法等
- 专利标题： TiAgN coating layer, TiAgN coating method and TiAgN coating apparatus
- 专利标题（中）： TiAgN涂层，TiAgN涂层法，TiAgN涂层法等
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申请号： US13830250申请日： 2013-03-14
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公开(公告)号： US09399813B2公开(公告)日： 2016-07-26
- 发明人: Woong Pyo Hong , In Woong Lyo , Hyuk Kang , Kwang Hoon Choi
- 申请人： Hyundai Motor Company
- 申请人地址： KR Seoul
- 专利权人： Hyundai Motor Company
- 当前专利权人： Hyundai Motor Company
- 当前专利权人地址： KR Seoul
- 代理机构： Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.
- 代理商 Peter F. Corless
- 优先权： KR10-2012-0146054 20121214
- 主分类号： C01B21/00
- IPC分类号： C01B21/00 ; C23C14/06 ; C01B21/076 ; C01B21/06 ; H01J37/32
摘要：
Disclosed is a TiAgN coating layer, formed by subjecting a substrate having a surface roughness of about 0.05˜0.1 μm to plasma coating by periodically turning on/off an Ag source while a Ti source is continuously turned on in a nitrogen gas atmosphere, a TiAgN coating method, and a TiAgN coating apparatus.
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