Invention Grant
- Patent Title: Method for making topological insulator structure
- Patent Title (中): 拓扑绝缘体结构的制作方法
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Application No.: US14055853Application Date: 2013-10-16
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Publication No.: US09394624B2Publication Date: 2016-07-19
- Inventor: Qi-Kun Xue , Ke He , Xu-Cun Ma , Xi Chen , Li-Li Wang , Cui-Zu Chang , Xiao Feng , Yao-Yi Li , Jin-Feng Jia
- Applicant: Tsinghua University , Institute of Physics, Chinese Academy of Sciences
- Applicant Address: CN Beijing CN Beijing
- Assignee: Tsinghua University,Institute of Physics, Chinese Academy of Sciences
- Current Assignee: Tsinghua University,Institute of Physics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing CN Beijing
- Agency: ScienBiziP, P.C.
- Priority: CN2012105594581 20121221
- Main IPC: C30B23/02
- IPC: C30B23/02 ; C30B25/18 ; H01L43/14 ; C30B23/00

Abstract:
A method for forming a topological insulator structure is provided. A strontium titanate substrate having a surface (111) is used. The surface (111) of the strontium titanate substrate is cleaned by heat-treating the strontium titanate substrate in the molecular beam epitaxy chamber. The strontium titanate substrate is heated and Bi beam, Sb beam, Cr beam, and Te beam are formed in the molecular beam epitaxy chamber in a controlled ratio achieved by controlling flow rates of the Bi beam, Sb beam, Cr beam, and Te beam. The magnetically doped topological insulator quantum well film is formed on the surface (111) of the strontium titanate substrate. The amount of the hole type charge carriers introduced by the doping with Cr is substantially equal to the amount of the electron type charge carriers introduced by the doping with Bi.
Public/Granted literature
- US20140174343A1 METHOD FOR MAKING TOPOLOGICAL INSULATOR STRUCTURE Public/Granted day:2014-06-26
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