发明授权
- 专利标题: Method for producing electrostatic chuck and electrostatic chuck
- 专利标题(中): 静电吸盘和静电吸盘的制造方法
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申请号: US13432376申请日: 2012-03-28
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公开(公告)号: US09394206B2公开(公告)日: 2016-07-19
- 发明人: Kazuhiro Nobori , Masahito Eguchi , Takuji Kimura
- 申请人: Kazuhiro Nobori , Masahito Eguchi , Takuji Kimura
- 申请人地址: JP Nagoya
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: JP Nagoya
- 代理机构: Burr & Brown, PLLC
- 优先权: JP2011-075446 20110330
- 主分类号: B21D39/00
- IPC分类号: B21D39/00 ; C04B35/645 ; B32B18/00 ; C04B35/111 ; C04B35/581 ; C04B35/626 ; C04B35/634 ; H01L21/683
摘要:
A method for producing an electrostatic chuck includes the steps of (a) placing a ceramic slurry in a molding die, the ceramic slurry containing a ceramic powder, a solvent, a dispersing agent, and a gelling agent, gelatinizing the ceramic slurry in the molding die, and removing the molding die to obtain first and second ceramic molded bodies; (b) drying, debinding, and calcining the first and second molded bodies to obtain first and second ceramic calcined bodies; (c) printing an electrostatic electrode paste on a surface of one of the first and second ceramic calcined bodies to form an electrostatic electrode while assuming the first ceramic calcined body is to form a dielectric layer of an electrostatic chuck; and (d) superposing the first and second ceramic calcined bodies on each other to sandwich the electrostatic electrode and subjecting the first and second calcined bodies to hot-press firing.
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