发明授权
- 专利标题: MEMS vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer
- 专利标题(中): MEMS振动结构采用取向依赖单晶压电薄膜层
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申请号: US14031454申请日: 2013-09-19
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公开(公告)号: US09385685B2公开(公告)日: 2016-07-05
- 发明人: Kushal Bhattacharjee , Sergei Zhgoon
- 申请人: RF Micro Devices, Inc.
- 申请人地址: US NC Greensboro
- 专利权人: RF Micro Devices, Inc.
- 当前专利权人: RF Micro Devices, Inc.
- 当前专利权人地址: US NC Greensboro
- 代理机构: Withrow & Terranova, P.L.L.C.
- 主分类号: H01L41/053
- IPC分类号: H01L41/053 ; H01L41/047 ; H03H9/25 ; H03H9/125 ; H03H9/15 ; C04B35/00 ; H03H9/17
摘要:
A micro-electrical-mechanical system (MEMS) vibrating structure includes a carrier substrate, a first anchor, a second anchor, a single crystal piezoelectric body, a first conducting layer, and a second conducting layer. The first anchor and the second anchor are provided on the surface of the carrier substrate. The single-crystal piezoelectric body is suspended between the first anchor and the second anchor, and includes a uniform crystalline orientation defined by a set of Euler angles. The single-crystal piezoelectric body includes a first surface parallel to and facing the surface of the carrier substrate on which the first anchor and the second anchor are formed and a second surface opposite the first surface. The first conducting layer is inter-digitally dispersed on the second surface of the single-crystal piezoelectric body. The second conducting layer is inter-digitally dispersed on the first surface of the single-crystal piezoelectric body.
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