发明授权
- 专利标题: Pixel of an image sensor, and image sensor
- 专利标题(中): 图像传感器的像素和图像传感器
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申请号: US14633381申请日: 2015-02-27
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公开(公告)号: US09385157B2公开(公告)日: 2016-07-05
- 发明人: Young-Woo Jung , Jung-Chak Ahn , Hee-Geun Jeong
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Volentine & Whitt, PLLC
- 优先权: KR10-2014-0087567 20140711
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
摘要:
A pixel of an image sensor includes a photoelectric conversion region formed in a semiconductor substrate, a floating diffusion region formed in the semiconductor substrate, the floating diffusion region being spaced apart from the photoelectric conversion region, a vertical transfer gate extending from a first surface of the semiconductor substrate into a recess in the semiconductor substrate, and configured to form a transfer channel between the photoelectric conversion region and the floating diffusion region, and an impurity region surrounding the recess. The impurity region has a first impurity concentration at a region adjacent to a side of the recess, and a second impurity concentration higher than the first impurity concentration at a region adjacent to the bottom of the recess.
公开/授权文献
- US20160013240A1 PIXEL OF AN IMAGE SENSOR, AND IMAGE SENSOR 公开/授权日:2016-01-14
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