发明授权
- 专利标题: Wrap-around fin for contacting a capacitor strap of a DRAM
- 专利标题(中): 用于接触DRAM电容带的绕包片
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申请号: US13484739申请日: 2012-05-31
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公开(公告)号: US09385131B2公开(公告)日: 2016-07-05
- 发明人: Felix Beaudoin , Stephen M. Lucarini , Xinhui Wang , Xinlin Wang
- 申请人: Felix Beaudoin , Stephen M. Lucarini , Xinhui Wang , Xinlin Wang
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L27/12 ; H01L21/8242
摘要:
A conductive strap structure in lateral contact with a top semiconductor layer is formed on an inner electrode of a deep trench capacitor. A cavity overlying the conductive strap structure is filled a dielectric material to form a dielectric capacitor cap having a top surface that is coplanar with a topmost surface of an upper pad layer. A semiconductor mandrel in lateral contact with the dielectric capacitor cap is formed. The combination of the dielectric capacitor cap and the semiconductor mandrel is employed as a protruding structure around which a fin-defining spacer is formed. The semiconductor mandrel is removed, and the fin-defining spacer is employed as an etch mask in an etch process that etches a lower pad layer and the top semiconductor layer to form a semiconductor fin that laterally wraps around the conductive strap structure. An access finFET is formed employing two parallel portions of the semiconductor fin.
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