发明授权
US09384891B2 Method and system for a metal finger capacitor with a triplet repeating sequence incorporating a metal underpass
有权
具有并入金属通道的三重重复序列的金属制电容器的方法和系统
- 专利标题: Method and system for a metal finger capacitor with a triplet repeating sequence incorporating a metal underpass
- 专利标题(中): 具有并入金属通道的三重重复序列的金属制电容器的方法和系统
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申请号: US14319747申请日: 2014-06-30
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公开(公告)号: US09384891B2公开(公告)日: 2016-07-05
- 发明人: Weizhong Cai
- 申请人: Maxlinear, Inc.
- 申请人地址: US CA Carlsbad
- 专利权人: Maxlinear, Inc.
- 当前专利权人: Maxlinear, Inc.
- 当前专利权人地址: US CA Carlsbad
- 代理机构: McAndrews, Held & Malloy
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; H01G4/002 ; H01L23/522 ; H01G4/005 ; H01G4/228 ; H01L49/02
摘要:
Methods and systems for a metal finger capacitor with a triplet repeating sequence incorporating a metal underpass may comprise repeating triplet capacitors integrated on a semiconductor die. The capacitors may comprise a first set of interconnected metal fingers comprising a first terminal of a first capacitor, a second set of interconnected metal fingers comprising a first terminal of a second capacitor, and a third set of interconnected metal fingers comprising a common node that surrounds the first and second sets of interconnected metal fingers. The common node may comprise a second terminal of the capacitors. A repeating pattern of fingers may be: (third set/second set/third set/first set . . . ). The repeating pattern of metal fingers may be arranged in two parallel rows to mitigate variations in the semiconductor die. The interconnected metal fingers may comprise first and second metal layers formed on the semiconductor die.
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