发明授权
- 专利标题: Detecting and displaying multi-patterning fix guidance
- 专利标题(中): 检测和显示多图案定位指导
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申请号: US14459657申请日: 2014-08-14
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公开(公告)号: US09384319B2公开(公告)日: 2016-07-05
- 发明人: Erdem Cilingir , Srini Arikati , Weiping Fang , Marco Hug
- 申请人: Synopsys, Inc.
- 申请人地址: US CA Mountain View
- 专利权人: Synopsys, Inc.
- 当前专利权人: Synopsys, Inc.
- 当前专利权人地址: US CA Mountain View
- 代理机构: Alston & Bird LLP
- 主分类号: G06F17/50
- IPC分类号: G06F17/50 ; G03F1/36
摘要:
A computer implemented method for validating a design is presented. The method includes generating, using the computer, a graph non-decomposable to a colored graph representative of the design, when the computer is invoked to validate the design. The method further includes identifying, using the computer, at least one guidance to at least one conflict in a mask layout associated with the design, the conflict causing the graph to be non-decomposable.
公开/授权文献
- US20150052490A1 DETECTING AND DISPLAYING MULTI-PATTERNING FIX GUIDANCE 公开/授权日:2015-02-19
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