Invention Grant
US09358762B2 Lamination apparatus with air pressure and method for non-contact lamination using lamination apparatus 有权
具有空气压力的层压装置和使用层压装置的非接触层压方法

Lamination apparatus with air pressure and method for non-contact lamination using lamination apparatus
Abstract:
A lamination apparatus, including: a substrate support; an adhesive film support that is disposed so as to be spaced from the substrate support; an air injection head that is disposed on a co-plane with the adhesive film support so as to be spaced apart from the substrate support or disposed so as to be further spaced apart from the substrate support than the adhesive film support; an air pump that supplies air to the air injection head; an air supply pipe that connects the air injection head with the air pump, wherein the air injection head includes an ion generation unit.
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