发明授权
- 专利标题: Three-dimensional memory structure having a back gate electrode
- 专利标题(中): 具有背栅电极的三维存储结构
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申请号: US14564555申请日: 2014-12-09
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公开(公告)号: US09355727B1公开(公告)日: 2016-05-31
- 发明人: Yanli Zhang , Johann Alsmeier , Yinda Dong , Akira Matsudaira
- 申请人: SanDisk Technologies, Inc.
- 申请人地址: US TX Plano
- 专利权人: SANDISK TECHNOLOGIES INC.
- 当前专利权人: SANDISK TECHNOLOGIES INC.
- 当前专利权人地址: US TX Plano
- 代理机构: The Marbury Law Group PLLC
- 主分类号: G11C11/34
- IPC分类号: G11C11/34 ; G11C16/04 ; G11C16/26
摘要:
A memory stack structure includes a cavity including a back gate electrode, a back gate dielectric, a semiconductor channel, and at least one charge storage element. In one embodiment, a line trench can be filled with a memory film layer, and a plurality of semiconductor channels can straddle the line trench. The back gate electrode can extend along the lengthwise direction of the line trench. In another embodiment, an isolated memory opening overlying a patterned conductive layer can be filled with a memory film, and the back gate electrode can be formed within a semiconductor channel and on the patterned conductive layer. A dielectric cap portion electrically isolates the back gate electrode from a drain region. The back gate electrode can be employed to bias the semiconductor channel, and to enable sensing of multinary bits corresponding to different amounts of electrical charges stored in a memory cell.
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