Invention Grant
- Patent Title: Mask plate, exposure system and exposing method
- Patent Title (中): 面膜,曝光系统和曝光方法
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Application No.: US14104394Application Date: 2013-12-12
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Publication No.: US09341938B2Publication Date: 2016-05-17
- Inventor: Zhenxia Chen , Fan Li , Ni Jiang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN CN
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN CN
- Agency: Baker Hostetler LLP
- Priority: CN201210537158 20121212
- Main IPC: G03F1/24
- IPC: G03F1/24 ; G03F1/50 ; G03F7/20 ; G03F1/52 ; G03F1/54

Abstract:
The invention is directed to a mask plate, an exposure system comprising a mask plate and an exposing method. The mask plate comprises a light transmitting region, a light shielding region, and a light reflecting region for reflecting exposure light to the light shielding region, with the pattern of the light from the transmitting region and reflecting region corresponding to the pattern of the region exposed to a first and a second substrate respectively. When exposure light irradiates on the mask plate, it passes through the light transmitting region and exposes the first substrate. The light reflecting region reflects the exposure light to a principal reflection structure which further reflects the light for exposing the second substrate. The first and second substrate may be exposed via the same mask plate to minimize waste of exposure light to save production time and efficiency.
Public/Granted literature
- US20140160454A1 MASK PLATE, EXPOSURE SYSTEM AND EXPOSING METHOD Public/Granted day:2014-06-12
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