Invention Grant
US09341790B2 Device and method for micro-electro-mechanical-system photonic switch
有权
微电子机械系统光子开关的装置和方法
- Patent Title: Device and method for micro-electro-mechanical-system photonic switch
- Patent Title (中): 微电子机械系统光子开关的装置和方法
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Application No.: US14203328Application Date: 2014-03-10
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Publication No.: US09341790B2Publication Date: 2016-05-17
- Inventor: Alan Frank Graves
- Applicant: Huawei Technologies Co., Ltd.
- Applicant Address: CN Shenzhen
- Assignee: Huawei Technologies Co., LTD.
- Current Assignee: Huawei Technologies Co., LTD.
- Current Assignee Address: CN Shenzhen
- Agency: Slater Matsil, LLP
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B6/35

Abstract:
In one embodiment, micro-electro-mechanical-system (MEMS) mirror structure includes an electrode plate including a first deflection electrode and a second deflection electrode, where the second deflection electrode is opposite the first deflection electrode, where the first deflection electrode is configured to receive a first drive voltage, and where the second deflection electrode is configured to receive a second drive voltage. The MEMS mirror structure also includes a mirror support pillar disposed on the electrode plate, where the mirror support pillar has a bearing surface and a mirror disposed above the bearing surface of the support pillar, where the mirror has a deflection angle, and where the first voltage is nonzero when the deflection angle is zero.
Public/Granted literature
- US20150253567A1 Device and Method for Micro-Electro-Mechanical-System Photonic Switch Public/Granted day:2015-09-10
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