A system and method of providing feedback control to a pulsed RF generator includes an RF generator having an RF output and a feedback input. An RF electrode is coupled to the RF output and an RF sampling circuit having a sampling input coupled to the RF electrode. The sampling circuit including a feedback signal output coupled to the feedback input of the RF generator. A method of providing feedback control to a pulse RF generator includes receiving an RF sample of an RF pulse, sampling the RF sample multiple sampling times to produce multiple feedback levels during the duration of the RF pulse and coupling the multiple feedback levels to a feedback input on an RF generator, the RF generator outputting the RF pulse.