发明授权
- 专利标题: Method and apparatus for the formation of conductive films on a substrate
- 专利标题(中): 在基板上形成导电膜的方法和装置
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申请号: US13892782申请日: 2013-05-13
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公开(公告)号: US09310685B2公开(公告)日: 2016-04-12
- 发明人: Alexander Bessonov
- 申请人: Nokia Technologies Oy
- 申请人地址: FI Espoo
- 专利权人: Nokia Technologies Oy
- 当前专利权人: Nokia Technologies Oy
- 当前专利权人地址: FI Espoo
- 代理机构: Alston & Bird LLP
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03F7/004 ; G03F7/40
摘要:
Provided herein are a method and apparatus for the formation of conductive films on a substrate using precise sintering of a conductive film and thermal management of the substrate during sintering. In particular, a method may include depositing a conductive metal-based ink on a translucent or transparent substrate, positioning a mask between the deposited conductive metal-based ink and a light source, exposing the mask and the underlying deposited conductive metal-based ink to the light source, sintering the conductive metal-based ink exposed to the light source, and cleaning the non-sintered conductive metal-based ink from the translucent or transparent substrate. The mask may be configured to shield at least a portion of the conductive metal-based ink from the light source. The portion of the conductive metal-based ink shielded from the light source may remain non-sintered in response to the sintering of the conductive metal-based ink exposed to the light source.
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