发明授权
- 专利标题: Semiconductor storage device and method of fabricating same
- 专利标题(中): 半导体存储装置及其制造方法
-
申请号: US14349386申请日: 2011-10-07
-
公开(公告)号: US09293508B2公开(公告)日: 2016-03-22
- 发明人: Yoshitaka Sasago , Masaharu Kinoshita
- 申请人: Yoshitaka Sasago , Masaharu Kinoshita
- 申请人地址: JP Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Miles & Stockbridge PC
- 国际申请: PCT/JP2011/005641 WO 20111007
- 国际公布: WO2013/051066 WO 20130411
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L27/24 ; H01L45/00
摘要:
A memory cell array having such a structure that can be realized with a simpler process and ideal for realizing a higher density is provided. Memory cells have a structure in which channel layers (88p and 89p) are formed on the side surfaces of each of a plurality of stacked structures which extends in the Y direction and is periodically formed in the X direction with a gate insulator film layer (9) interposed, and a resistance-change material layer (7) is formed so as to be electrically connected to two adjacent channel layers of the channel layers. Due to such a structure, it is not necessary to perform such a very difficult step that processes the resistance-change material and the silicons collectively and it is possible to provide the memory cell array with a simpler process.
公开/授权文献
信息查询
IPC分类: