发明授权
US09293508B2 Semiconductor storage device and method of fabricating same 有权
半导体存储装置及其制造方法

Semiconductor storage device and method of fabricating same
摘要:
A memory cell array having such a structure that can be realized with a simpler process and ideal for realizing a higher density is provided. Memory cells have a structure in which channel layers (88p and 89p) are formed on the side surfaces of each of a plurality of stacked structures which extends in the Y direction and is periodically formed in the X direction with a gate insulator film layer (9) interposed, and a resistance-change material layer (7) is formed so as to be electrically connected to two adjacent channel layers of the channel layers. Due to such a structure, it is not necessary to perform such a very difficult step that processes the resistance-change material and the silicons collectively and it is possible to provide the memory cell array with a simpler process.
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