Invention Grant
- Patent Title: Thin film transistor and method for fabricating thin film transistor
- Patent Title (中): 薄膜晶体管及制造薄膜晶体管的方法
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Application No.: US14367361Application Date: 2012-12-20
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Publication No.: US09293325B2Publication Date: 2016-03-22
- Inventor: Tatsuya Shimoda , Hirokazu Tsukada , Takaaki Miyasako
- Applicant: JAPAN SCIENCE AND TECHNOLOGY AGENCY , MITSUBISHI MATERIALS CORPORATION , MITSUBISHI MATERIALS ELECTRONIC CHEMICALS CO., LTD.
- Applicant Address: JP Saitama JP Tokyo JP Akita
- Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY,MITSUBISHI MATERIALS CORPORATION,MITSUBISHI MATERIALS ELECTRONIC CHEMICALS CO., LTD.
- Current Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY,MITSUBISHI MATERIALS CORPORATION,MITSUBISHI MATERIALS ELECTRONIC CHEMICALS CO., LTD.
- Current Assignee Address: JP Saitama JP Tokyo JP Akita
- Priority: JP2011-281464 20111222
- International Application: PCT/JP2012/083082 WO 20121220
- International Announcement: WO2013/094688 WO 20130627
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/786 ; H01L29/49 ; H01L29/66

Abstract:
An object of the present invention is to achieve improvement in performance of a thin film transistor including an oxide as a gate insulating layer, or simplification and energy saving in the processes of producing such a thin film transistor. A thin film transistor (100) of the present invention includes a first oxide layer (possibly containing inevitable impurities) (32) consisting of lanthanum (La) and tantalum (Ta), which has a surface (32a) formed after a precursor layer obtained from a precursor solution as a start material including a precursor containing lanthanum (La) and a precursor containing tantalum (Ta) as solutes is exposed to a hydrochloric acid vapor, between a gate electrode (20) and a channel (52). Moreover, in the thin film transistor, the surface (32a) of the first oxide layer (32) is in contact with the channel (52).
Public/Granted literature
- US20150001536A1 THIN FILM TRANSISTOR AND METHOD FOR FABRICATING THIN FILM TRANSISTOR Public/Granted day:2015-01-01
Information query
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