Invention Grant
US09287174B2 Fiber-containing resin substrate, device-mounting substrate and device-forming wafer, semiconductor apparatus, and method for producing semiconductor apparatus
有权
含纤维树脂基板,装置安装基板和元件形成用晶片,半导体装置以及半导体装置的制造方法
- Patent Title: Fiber-containing resin substrate, device-mounting substrate and device-forming wafer, semiconductor apparatus, and method for producing semiconductor apparatus
- Patent Title (中): 含纤维树脂基板,装置安装基板和元件形成用晶片,半导体装置以及半导体装置的制造方法
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Application No.: US14080319Application Date: 2013-11-14
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Publication No.: US09287174B2Publication Date: 2016-03-15
- Inventor: Susumu Sekiguchi , Toshio Shiobara , Hideki Akiba , Tomoaki Nakamura
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2012-252884 20121119
- Main IPC: H01L23/29
- IPC: H01L23/29 ; H01L21/78 ; H01L21/56 ; H01L23/31 ; H01L23/00 ; C03C25/26 ; C08J5/08

Abstract:
A fiber-containing resin substrate for collectively encapsulating a semiconductor-device-mounting surface of a substrate on which semiconductor devices are mounted or a semiconductor-device-forming surface of a wafer on which a semiconductor device is formed, including a resin-impregnated fibrous base material which is obtained by impregnating a fibrous base material with a thermosetting resin and semi-curing or curing the thermosetting resin and has a linear expansion coefficient (ppm/° C.) in an X-Y direction of less than 3 ppm, and an uncured resin layer formed of an uncured thermosetting resin on one side of the resin-impregnated fibrous base material.
Public/Granted literature
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