发明授权
- 专利标题: System and methods for plasma application
- 专利标题(中): 等离子体应用的系统和方法
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申请号: US14669028申请日: 2015-03-26
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公开(公告)号: US09287091B2公开(公告)日: 2016-03-15
- 发明人: Il-Gyo Koo , Cameron A. Moore , George J. Collins , Jin-Hoon Cho
- 申请人: COLORADO STATE UNIVERSITY RESEARCH FOUNDATION
- 申请人地址: US CO Fort Collins
- 专利权人: Colorado State University Research Foundation
- 当前专利权人: Colorado State University Research Foundation
- 当前专利权人地址: US CO Fort Collins
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H05H1/24
摘要:
A plasma system includes a plasma device, an ionizable media source, and a power source. The plasma device includes an inner electrode and an outer electrode coaxially disposed around the inner electrode. The inner electrode includes a distal portion and an insulative layer that covers at least a portion of the inner electrode. The ionizable media source is coupled to the plasma device and is configured to supply ionizable media thereto. The power source is coupled to the inner and outer electrodes, and is configured to ignite the ionizable media at the plasma device to form a plasma effluent having an electron sheath layer about the exposed distal portion.
公开/授权文献
- US20150200076A1 SYSTEM AND METHODS FOR PLASMA APPLICATION 公开/授权日:2015-07-16
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