Invention Grant
US09275861B2 Methods of forming group III-V semiconductor materials on group IV substrates and the resulting substrate structures
有权
在IV族基底上形成III-V族半导体材料的方法和所得到的衬底结构
- Patent Title: Methods of forming group III-V semiconductor materials on group IV substrates and the resulting substrate structures
- Patent Title (中): 在IV族基底上形成III-V族半导体材料的方法和所得到的衬底结构
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Application No.: US13927685Application Date: 2013-06-26
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Publication No.: US09275861B2Publication Date: 2016-03-01
- Inventor: Li Yang , Kejia Wang , Ashish Baraskar , Bin Yang , Shurong Liang
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/04 ; H01L29/20

Abstract:
One method disclosed herein includes forming a patterned mask layer above a surface of a semiconductor substrate, performing at least one etching process through the patterned mask layer to define a plurality of intersecting ridges that define a ridged surface in the substrate, and forming a Group III-V material on the ridged surface of the substrate. An illustrative device disclosed herein includes a Group IV substrate having a ridged surface comprised of a plurality of intersecting ridges and a Group III-V material layer positioned on the ridged surface of the Group IV substrate.
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