发明授权
US09234797B1 Compact THz imaging detector with an integrated micro-spectrometer spectral tuning matrix
有权
紧凑型THz成像检测器,具有集成的微光谱仪频谱调谐矩阵
- 专利标题: Compact THz imaging detector with an integrated micro-spectrometer spectral tuning matrix
- 专利标题(中): 紧凑型THz成像检测器,具有集成的微光谱仪频谱调谐矩阵
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申请号: US13785435申请日: 2013-03-05
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公开(公告)号: US09234797B1公开(公告)日: 2016-01-12
- 发明人: Jeffrey Daniel Newman , Paul Poo-Kam Lee , Andrew Paul Sacco
- 申请人: EXELIS, INC.
- 申请人地址: US VA Herndon
- 专利权人: Exelis, Inc.
- 当前专利权人: Exelis, Inc.
- 当前专利权人地址: US VA Herndon
- 代理机构: RatnerPrestia
- 主分类号: G01J5/02
- IPC分类号: G01J5/02 ; G01J3/28
摘要:
A focal plane array (FPA) imaging sensor includes an array of multiple tuning cells disposed on a monolithic substrate, in which each tuning cell includes: (a) a tunable etalon disposed in the monolithic substrate, and (b) a THz detector assembly comprised of at least two antennae disposed in the monolithic substrate. The THz detector assembly is disposed below the tunable etalon. Each tunable etalon includes a Fabry-Pérot interferometer comprised of upper and lower mirrors, spaced by a gap between the mirrors, the gap forming an etalon of the interferometer. The FPA imaging sensor may also be formed as a hybrid, in which portions of the tuning cells are fabricated separately from the THz detector assembly and aligned to each other. The lower mirrors may also be fabricated monolithically with the substrate and the upper mirrors may be formed separately and then aligned to the lower mirrors.
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