Invention Grant
US09231046B2 Capacitor using barrier layer metallurgy 有权
电容器采用阻隔层冶金

Capacitor using barrier layer metallurgy
Abstract:
A metal-insulator-metal (MIM) capacitor using barrier layer metallurgy and methods of manufacture are disclosed. The method includes forming a bottom plate of a metal-insulator-metal (MIM) capacitor and a bonding pad using a single masking process. The method further includes forming a MIM dielectric on the bottom plate. The method further includes forming a top plate of the MIM capacitor on the MIM dielectric. The method further includes forming a solder connection on the bonding pad.
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