Invention Grant
- Patent Title: Capacitor using barrier layer metallurgy
- Patent Title (中): 电容器采用阻隔层冶金
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Application No.: US13840132Application Date: 2013-03-15
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Publication No.: US09231046B2Publication Date: 2016-01-05
- Inventor: Timothy H. Daubenspeck , Jeffrey P. Gambino , Zhong-Xiang He , Christopher D. Muzzy , Wolfgang Sauter
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent David Cain; Andrew M. Calderon
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L23/528 ; H01L23/522 ; H01L49/02 ; H01L27/08 ; H01L23/00

Abstract:
A metal-insulator-metal (MIM) capacitor using barrier layer metallurgy and methods of manufacture are disclosed. The method includes forming a bottom plate of a metal-insulator-metal (MIM) capacitor and a bonding pad using a single masking process. The method further includes forming a MIM dielectric on the bottom plate. The method further includes forming a top plate of the MIM capacitor on the MIM dielectric. The method further includes forming a solder connection on the bonding pad.
Public/Granted literature
- US20140264741A1 CAPACITOR USING BARRIER LAYER METALLURGY Public/Granted day:2014-09-18
Information query
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