Invention Grant
- Patent Title: Article edge inspection
- Patent Title (中): 文章边检
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Application No.: US14096002Application Date: 2013-12-03
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Publication No.: US09201019B2Publication Date: 2015-12-01
- Inventor: David M. Tung , Joachim W. Ahner
- Applicant: Seagate Technology LLC
- Applicant Address: US CA Cupertino
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Cupertino
- Main IPC: G01N21/88
- IPC: G01N21/88
Abstract:
Provided herein is an apparatus, including a photon emitting means for emitting photons onto surface edges of an article, a photon detecting means for detecting photons scattered from particles on the surface edges of the article, and a mapping means for mapping a particle or a defect of the surface of the article.
Public/Granted literature
- US20140354980A1 ARTICLE EDGE INSPECTION Public/Granted day:2014-12-04
Information query
