A chip device package and a fabrication method thereof are provided. The chip device package includes a semiconductor substrate having a first surface and an opposing second surface. A recessed portion is disposed adjacent to a sidewall of the semiconductor substrate, extending from the first surface of the semiconductor substrate to at least the second surface of the semiconductor substrate. A protection layer is disposed over the first surface of the semiconductor substrate and in the recessed portion. A through hole is disposed on the first surface of the semiconductor substrate. A buffer material that is different from the material of the protection layer is disposed in the through hole and covered by the protection layer.