Invention Grant
US09187817B2 Mask assembly for thin film vapor deposition and manufacturing method thereof 有权
薄膜蒸镀掩模组件及其制造方法

  • Patent Title: Mask assembly for thin film vapor deposition and manufacturing method thereof
  • Patent Title (中): 薄膜蒸镀掩模组件及其制造方法
  • Application No.: US14078008
    Application Date: 2013-11-12
  • Publication No.: US09187817B2
    Publication Date: 2015-11-17
  • Inventor: Yong-Hwan Kim
  • Applicant: Samsung Display Co., Ltd.
  • Applicant Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
  • Assignee: Samsung Display Co., Ltd.
  • Current Assignee: Samsung Display Co., Ltd.
  • Current Assignee Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
  • Agent Robert E. Bushnell, Esq.
  • Priority: KR10-2012-0129596 20121115
  • Main IPC: B05C11/00
  • IPC: B05C11/00 C23C14/04 H01L51/00
Mask assembly for thin film vapor deposition and manufacturing method thereof
Abstract:
A mask assembly for a thin film deposition includes: a frame main body forming an opening; a plurality of unit masks having both ends fixed to the frame main body in a state that a tension force is applied in a first direction; and an end tension unit installed to the frame main body. The end tension unit moves according to a second direction crossing the first direction between two neighboring unit masks among a plurality of unit masks for tensioning of the unit mask in the second direction.
Information query
Patent Agency Ranking
0/0