Invention Grant
US09186694B2 Modular-construction vacuum-coating system 有权
模块化施工真空镀膜系统

Modular-construction vacuum-coating system
Abstract:
A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay involved in supplying media, a functional chamber, as a first submodule, is arranged in a first module and provided with an outer interface which is the same for at least a second module.
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