Invention Grant
- Patent Title: Modular-construction vacuum-coating system
- Patent Title (中): 模块化施工真空镀膜系统
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Application No.: US13700811Application Date: 2011-06-14
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Publication No.: US09186694B2Publication Date: 2015-11-17
- Inventor: Matthias Smolke , Matthias Klooss , Andrej Wolf , Johannes Struempfel
- Applicant: Matthias Smolke , Matthias Klooss , Andrej Wolf , Johannes Struempfel
- Applicant Address: DE Dresden
- Assignee: VON ARDENNE GmbH
- Current Assignee: VON ARDENNE GmbH
- Current Assignee Address: DE Dresden
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Priority: DE102010030006 20100611
- International Application: PCT/EP2011/059813 WO 20110614
- International Announcement: WO2011/154554 WO 20111215
- Main IPC: B05C9/08
- IPC: B05C9/08 ; C23C14/56

Abstract:
A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay involved in supplying media, a functional chamber, as a first submodule, is arranged in a first module and provided with an outer interface which is the same for at least a second module.
Public/Granted literature
- US20130139750A1 MODULAR-CONSTRUCTION VACUUM-COATING SYSTEM Public/Granted day:2013-06-06
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