Invention Grant
- Patent Title: Scanning optical microscope
- Patent Title (中): 扫描光学显微镜
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Application No.: US14483161Application Date: 2014-09-11
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Publication No.: US09170411B2Publication Date: 2015-10-27
- Inventor: Keiichi Matsuzaki , Teruhiro Shiono
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2013-213431 20131011
- Main IPC: G02B21/00
- IPC: G02B21/00

Abstract:
A scanning optical microscope includes a light source; a first beam splitter that splits light into irradiation light and reference light; a first objective lens that converges the irradiation light on a sample and receives signal light; a second beam splitter that splits the signal light off from an optical path; a pin hole positioned on an optical path of the split signal light at a position optically conjugate with an image-forming point of the first objective lens; a condenser lens that converges the split signal light on the pin hole; a phase plate that outputs first light including at least four firstly-split beams having different phases; a third beam splitter that multiplexes the first light and second light to generate interfering light including at least four secondly-split beams having different phases; and a light detecting element that receives the interfering light and outputs at least four electric signals.
Public/Granted literature
- US20150103352A1 SCANNING OPTICAL MICROSCOPE Public/Granted day:2015-04-16
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