Invention Grant
US09142409B2 Polysilicon thin film and manufacturing method thereof, array substrate and display device 有权
多晶硅薄膜及其制造方法,阵列基板及显示装置

Polysilicon thin film and manufacturing method thereof, array substrate and display device
Abstract:
A polysilicon thin film and a manufacturing method thereof, an array substrate and a display device are disclosed. The manufacturing method of the polysilicon thin film comprises the following steps: forming a graphene layer and an amorphous silicon layer which are adjacent; forming polysilicon by way of crystallizing amorphous silicon so as to obtain the polysilicon thin film. The polysilicon thin film manufactured by the method possesses good characteristics.
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