Invention Grant
- Patent Title: Thin film transistor and manufacturing method thereof
- Patent Title (中): 薄膜晶体管及其制造方法
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Application No.: US14495835Application Date: 2014-09-24
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Publication No.: US09136342B2Publication Date: 2015-09-15
- Inventor: Yeon Taek Jeong , Bo Sung Kim , Doo-Hyoung Lee , June Whan Choi , Tae-Young Choi , Kano Masataka
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2011-0090618 20110907
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/423 ; H01L29/51 ; H01L29/49 ; H01L29/786

Abstract:
A thin film transistor is provided. A thin film transistor according to an exemplary embodiment of the present invention includes: a substrate; a gate line disposed on the substrate and including a gate electrode; a semiconductor layer disposed on the substrate and including at least a portion overlapping the gate electrode; a gate insulating layer disposed between the gate line and the semiconductor layer; and a source electrode and a drain electrode disposed on the substrate and facing each other over a channel region of the semiconductor layer. The gate insulating layer includes a first region and a second region, the first region corresponds to the channel region of the semiconductor layer, the first region is made of a first material, the second region is made of a second material, and the first material and the second material have different atomic number ratios of carbon and silicon.
Public/Granted literature
- US20150008437A1 THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2015-01-08
Information query
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