Invention Grant
US09133549B2 Gas sensor using metal oxide nanoparticles, and method for manufacturing same
有权
使用金属氧化物纳米颗粒的气体传感器及其制造方法
- Patent Title: Gas sensor using metal oxide nanoparticles, and method for manufacturing same
- Patent Title (中): 使用金属氧化物纳米颗粒的气体传感器及其制造方法
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Application No.: US13266815Application Date: 2010-04-30
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Publication No.: US09133549B2Publication Date: 2015-09-15
- Inventor: Il-Doo Kim , Dong-Young Kim , Sung-Yeon Jang , Seong-Mu Jo , Jae-Min Hong , Yun-Seok Lee , Sung-Chul Yang
- Applicant: Il-Doo Kim , Dong-Young Kim , Sung-Yeon Jang , Seong-Mu Jo , Jae-Min Hong , Yun-Seok Lee , Sung-Chul Yang
- Applicant Address: KR Gyeonggi-do KR Seoul
- Assignee: AMOGREENTECH CO., LTD.,Korea Institute of Science and Technology
- Current Assignee: AMOGREENTECH CO., LTD.,Korea Institute of Science and Technology
- Current Assignee Address: KR Gyeonggi-do KR Seoul
- Agency: Dickstein Shapiro LLP
- Priority: KR10-2009-0038043 20090430
- International Application: PCT/KR2010/002766 WO 20100430
- International Announcement: WO2010/126336 WO 20101104
- Main IPC: G01N33/00
- IPC: G01N33/00 ; C23C24/04 ; C23C4/12 ; C23C4/18 ; C23C24/00 ; C23C26/00 ; G01N27/12

Abstract:
The present invention provides a gas sensor, including: a sensor substrate provided with an electrode; and a thin layer of sensor material formed by spraying a solution in which metal oxide nanoparticles are dispersed onto the sensor substrate. The gas sensor is advantageous in that a sensor material is formed into a porous thin layer containing metal oxide nanoparticles having a large specific surface area, thus realizing high sensitivity on the ppb scale and a high reaction rate. Further, the gas sensor is advantageous in that it can be manufactured at room temperature, and the thickness of a sensor material can be easily adjusted by adjusting the spray time, so that a thin gas sensor or a thick gas sensor can be easily manufactured.
Public/Granted literature
- US20120042713A1 GAS SENSOR USING METAL OXIDE NANOPARTICLES, AND METHOD FOR MANUFACTURING SAME Public/Granted day:2012-02-23
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