Invention Grant
US09133549B2 Gas sensor using metal oxide nanoparticles, and method for manufacturing same 有权
使用金属氧化物纳米颗粒的气体传感器及其制造方法

Gas sensor using metal oxide nanoparticles, and method for manufacturing same
Abstract:
The present invention provides a gas sensor, including: a sensor substrate provided with an electrode; and a thin layer of sensor material formed by spraying a solution in which metal oxide nanoparticles are dispersed onto the sensor substrate. The gas sensor is advantageous in that a sensor material is formed into a porous thin layer containing metal oxide nanoparticles having a large specific surface area, thus realizing high sensitivity on the ppb scale and a high reaction rate. Further, the gas sensor is advantageous in that it can be manufactured at room temperature, and the thickness of a sensor material can be easily adjusted by adjusting the spray time, so that a thin gas sensor or a thick gas sensor can be easily manufactured.
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