发明授权
- 专利标题: Liquid vaporizer
- 专利标题(中): 液体蒸发器
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申请号: US13945710申请日: 2013-07-18
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公开(公告)号: US09127359B2公开(公告)日: 2015-09-08
- 发明人: Masayuki Kouketsu , Hiroshi Itafuji
- 申请人: CKD CORPORATION
- 申请人地址: JP Komaki-shi, Aichi
- 专利权人: CKD CORPORATION
- 当前专利权人: CKD CORPORATION
- 当前专利权人地址: JP Komaki-shi, Aichi
- 代理机构: Beyer Law Group LLP
- 优先权: JP2011-009193 20110119
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; C23C16/448 ; C23C14/24 ; B01B1/00 ; B01F3/02 ; B01D1/14 ; H01L21/67
摘要:
A liquid vaporizer is configured to vaporize a liquid reagent and mix the vaporized liquid reagent with a gaseous medium. The liquid vaporizer is equipped with a main vaporizer body having a mixed gas generating space, and a vaporizing unit disposed inside the mixed gas generating space. The vaporizing unit has a vaporizing unit main body having a vaporization surface and a net-shaped body formed in a planar shape by knitting wires regularly in a net-like shape. The net-shaped body forms a plurality of mesh spaces surrounded by the wires and arranged regularly in the in-plane direction. The vaporizing unit forms a plurality of liquid reagent supply spaces surrounded by the wires and the vaporization surface as a result of the net-shaped body and the vaporization surface being abutted against each other. The liquid reagent supply spaces are arranged regularly in the in-plane direction of the net-shaped body.
公开/授权文献
- US20130298834A1 LIQUID VAPORIZER 公开/授权日:2013-11-14
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