发明授权
US09112040B2 Amorphous oxide thin film transistor, method for manufacturing the same, and display panel
有权
无定形氧化物薄膜晶体管,其制造方法和显示面板
- 专利标题: Amorphous oxide thin film transistor, method for manufacturing the same, and display panel
- 专利标题(中): 无定形氧化物薄膜晶体管,其制造方法和显示面板
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申请号: US13428422申请日: 2012-03-23
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公开(公告)号: US09112040B2公开(公告)日: 2015-08-18
- 发明人: Xiaodi Liu , Li Sun , Haijing Chen
- 申请人: Xiaodi Liu , Li Sun , Haijing Chen
- 申请人地址: CN Beijing
- 专利权人: BOE TECHNOLOGY GROUP CO., LTD.
- 当前专利权人: BOE TECHNOLOGY GROUP CO., LTD.
- 当前专利权人地址: CN Beijing
- 代理机构: Ladas & Parry LLP
- 优先权: CN201110076083 20110328
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L29/66
摘要:
Embodiments of the disclosed technology provide an amorphous oxide thin film transistor (TFT), a method for preparing an amorphous oxide TFT, and a display panel. The amorphous oxide thin film transistor includes: a gate electrode, a gate insulating layer, a semiconductor active layer, a source electrode and a drain electrode. The semiconductor active layer comprises a channel layer and an ohmic contact layer, and the channel layer has a greater content of oxygen than the ohmic contact layer; the channel layer contacts the gate insulating layer, and the ohmic contact layer comprises two separated ohmic contact regions, one of which contacts the source electrode and the other of which contacts the drain electrode.
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