发明授权
US09082784B2 Method of fabricating a semiconductor device having stacked storage nodes of capacitors in cell region separated from peripheral region
有权
制造半导体器件的方法,该半导体器件具有与周边区域分离的单元区域中的电容器的堆叠存储节点
- 专利标题: Method of fabricating a semiconductor device having stacked storage nodes of capacitors in cell region separated from peripheral region
- 专利标题(中): 制造半导体器件的方法,该半导体器件具有与周边区域分离的单元区域中的电容器的堆叠存储节点
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申请号: US14505098申请日: 2014-10-02
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公开(公告)号: US09082784B2公开(公告)日: 2015-07-14
- 发明人: Jun Ki Kim
- 申请人: SK hynix Inc.
- 申请人地址: KR Gyeonggi-do
- 专利权人: SK Hynix Inc.
- 当前专利权人: SK Hynix Inc.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: William Park & Associates Ltd.
- 优先权: KR10-2011-0013457 20110215
- 主分类号: H01L21/338
- IPC分类号: H01L21/338 ; H01L21/337 ; H01L49/02 ; H01L27/108 ; H01L21/768 ; H01L21/306

摘要:
Methods of fabricating a semiconductor device are provided. The method includes forming a first mold layer on a in a cell region and a peripheral region, forming first storage nodes penetrating the first mold layer in the cell region and a first contact penetrating the first mold layer in the peripheral region, forming a second mold layer on the first mold layer, forming second storage nodes that penetrate the second mold layer to be connected to respective ones of the first storage nodes, removing the second mold layer in the cell and peripheral regions and the first mold layer in the cell region to leave the first mold layer in the peripheral region, and forming a second contact that penetrates a first interlayer insulation layer to be connected to the first contact. Related devices are also provided.
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