发明授权
US09070180B2 Method, system, and computer program product for detection of defects based on multiple references
有权
基于多个参考的检测缺陷的方法,系统和计算机程序产品
- 专利标题: Method, system, and computer program product for detection of defects based on multiple references
- 专利标题(中): 基于多个参考的检测缺陷的方法,系统和计算机程序产品
-
申请号: US13773549申请日: 2013-02-21
-
公开(公告)号: US09070180B2公开(公告)日: 2015-06-30
- 发明人: Moshe Amzaleg , Yehuda Cohen , Nir Ben-David Dodzin , Efrat Rozenman
- 申请人: Applied Materials Israel Ltd.
- 申请人地址: IL Rehovot
- 专利权人: APPLIED MATERIALS ISRAEL, LTD.
- 当前专利权人: APPLIED MATERIALS ISRAEL, LTD.
- 当前专利权人地址: IL Rehovot
- 代理机构: Lowenstein Sandler LLP
- 主分类号: G06K9/00
- IPC分类号: G06K9/00 ; G06T7/00 ; H01L21/67
摘要:
A defect detection system for computerized detection of defects in an inspected object based on processing of an inspection image generated by collecting signals arriving from the inspected object, the system including: an interface for obtaining an inspected noise-indicative value and multiple reference noise-indicative values, the inspected noise-indicative value representative of an analyzed pixel and each of the reference noise-indicative values representative of a reference pixel among a plurality of reference pixels; and a processor, including: a noise analysis module, configured to compute a representative noise-indicative value based on a plurality of noise-indicative values which includes the inspected noise-indicative value and the multiple reference noise-indicative values; and a defect analysis module, configured to calculate a defect-indicative value based on an inspected value representative of the analyzed pixel, and to determine a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.
公开/授权文献
信息查询