Invention Grant
- Patent Title: Replacement metal gate structure for CMOS device
- Patent Title (中): CMOS器件替代金属栅极结构
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Application No.: US14500914Application Date: 2014-09-29
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Publication No.: US09041118B2Publication Date: 2015-05-26
- Inventor: Takashi Ando , Kisik Choi , Vijay Narayanan
- Applicant: International Business Machines Corporation , GLOBAL FOUNDRIES Inc
- Applicant Address: US NY Armonk KY Grand Cayman
- Assignee: International Business Machines Corporation,Global Foundries, Inc
- Current Assignee: International Business Machines Corporation,Global Foundries, Inc
- Current Assignee Address: US NY Armonk KY Grand Cayman
- Agency: Law Offices of Ira D. Blecker, P.C.
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L27/092 ; H01L29/49 ; H01L29/423

Abstract:
A CMOS device that includes an nFET portion, a pFET portion and an interlayer dielectric between the nFET portion and pFET portion. The nFET portion has a gate structure having a recess filled with a conformal high-k dielectric, a first titanium nitride layer on the high-k dielectric, a barrier layer on the first titanium nitride layer, a second titanium nitride layer in direct physical contact with the barrier layer and a gate metal filling the remainder of the recess. The pFET portion has a gate structure having a recess filled with a conformal high-k dielectric, a first titanium nitride layer on the high-k dielectric, a barrier layer on the first titanium nitride layer, a second titanium nitride layer on the barrier layer, a third titanium nitride layer in direct physical contact with the second titanium nitride layer and a gate metal filling the remainder of the recess.
Public/Granted literature
- US20150054087A1 REPLACEMENT METAL GATE STRUCTURE FOR CMOS DEVICE Public/Granted day:2015-02-26
Information query
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