Invention Grant
US09041107B2 Devices with gate-to-gate isolation structures and methods of manufacture
有权
具有栅极到栅极隔离结构的器件和制造方法
- Patent Title: Devices with gate-to-gate isolation structures and methods of manufacture
- Patent Title (中): 具有栅极到栅极隔离结构的器件和制造方法
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Application No.: US13833735Application Date: 2013-03-15
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Publication No.: US09041107B2Publication Date: 2015-05-26
- Inventor: Brent A. Anderson , Edward J. Nowak , Jed H. Rankin
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Michael J. LeStrange
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/06 ; H01L21/02 ; H01L21/762 ; H01L21/84

Abstract:
Devices having gate-to-gate isolation structures and methods of manufacture are provided. The method includes forming a plurality of isolation structures in pad films and an underlying substrate. The method further includes forming a plurality of fins including the isolation structures and a second plurality of fins including the two pad films and a portion of the underlying substrate, each of which are separated by a trench. The method further includes removing portions of the second plurality of fins resulting in a height lower than a height of the plurality of fins including the isolation structures. The method further includes forming gate electrodes within each trench, burying the second plurality of fins and abutting sides of the plurality of fins including the isolation structures. The plurality of fins including the isolation structures electrically and physically isolate adjacent gate electrode of the gate electrodes.
Public/Granted literature
- US20130200458A1 DEVICES WITH GATE-TO-GATE ISOLATION STRUCTURES AND METHODS OF MANUFACTURE Public/Granted day:2013-08-08
Information query
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