发明授权
US09031683B2 Systems and methods for managing material storage vessels having information storage elements
有权
用于管理具有信息存储元件的材料储存容器的系统和方法
- 专利标题: Systems and methods for managing material storage vessels having information storage elements
- 专利标题(中): 用于管理具有信息存储元件的材料储存容器的系统和方法
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申请号: US12307957申请日: 2007-07-10
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公开(公告)号: US09031683B2公开(公告)日: 2015-05-12
- 发明人: Scott Elfstrom , Kathleen L. Hanson , Steven E. Haumersen , Thomas D. Johnson , Clari Nolet , William Smeaton
- 申请人: Scott Elfstrom , Kathleen L. Hanson , Steven E. Haumersen , Thomas D. Johnson , Clari Nolet , William Smeaton
- 申请人地址: US MA Billerica
- 专利权人: Entegris, Inc.
- 当前专利权人: Entegris, Inc.
- 当前专利权人地址: US MA Billerica
- 代理机构: Hultquist, PLLC
- 代理商 Steven J. Hultquist; Cathy Gates
- 国际申请: PCT/US2007/073107 WO 20070710
- 国际公布: WO2008/011297 WO 20080124
- 主分类号: G06F19/00
- IPC分类号: G06F19/00 ; G06F17/30 ; G01N37/00 ; G06Q10/06 ; G07C9/00
摘要:
Material management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating parameter. Material information may be determined by remote analysis and subsequently communicated to an electronic information storage device of a vessel containing such material. Location and movement of material storage vessels within a customer facility may be automatically tracked, with further transfer of material-specific information. Product information may be associatively stored with material-specific information utilized in product manufacture.
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