发明授权
- 专利标题: Image sensor with substrate noise isolation
- 专利标题(中): 具有衬底噪声隔离的图像传感器
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申请号: US13846418申请日: 2013-03-18
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公开(公告)号: US09030584B2公开(公告)日: 2015-05-12
- 发明人: Tiejun Dai
- 申请人: OmniVision Technologies, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: OmniVision Technologies, Inc.
- 当前专利权人: OmniVision Technologies, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely Sokoloff Taylor & Zafman LLP
- 主分类号: H04N3/14
- IPC分类号: H04N3/14 ; H04N5/335 ; H04N5/357 ; H01L27/146 ; H01L31/062 ; H01L31/113
摘要:
A process including forming an a backside-illuminated (BSI) image sensor in a substrate, the image sensor including a pixel array formed in or near a front surface of the substrate and one or more circuit blocks formed in the substrate near the pixel array, each circuit block including at least one support circuit. An interconnect layer is formed on the front surface of the substrate that includes a dielectric within which are embedded traces and vias, wherein the traces and vias electrically couple the pixel array to at least one of the one or more support circuits. An isolation trench is formed surrounding at least one of the one or more circuit blocks to isolate the pixel array and other circuit blocks from noise generated by the at least one support circuit within the circuit block surrounded by the isolation trench. Other embodiments are disclosed and claimed.
公开/授权文献
- US20140267860A1 IMAGE SENSOR WITH SUBSTRATE NOISE ISOLATION 公开/授权日:2014-09-18
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