发明授权
- 专利标题: Device for analysing the surface of a substrate
- 专利标题(中): 用于分析衬底表面的装置
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申请号: US13122091申请日: 2009-09-29
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公开(公告)号: US09030554B2公开(公告)日: 2015-05-12
- 发明人: Michel Pichon , Franc Davenne
- 申请人: Michel Pichon , Franc Davenne
- 申请人地址: FR Courbevoie
- 专利权人: Saint-Gobain Glass France
- 当前专利权人: Saint-Gobain Glass France
- 当前专利权人地址: FR Courbevoie
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: FR0856628 20081001
- 国际申请: PCT/FR2009/051838 WO 20090929
- 国际公布: WO2010/037958 WO 20100408
- 主分类号: H04N7/18
- IPC分类号: H04N7/18 ; G01B11/25 ; G01N21/896 ; G01N21/958
摘要:
An analysis device for analysing a transparent or specular surface of a substrate, the device including a raster located opposite the surface of the substrate to be measured, a video camera for capturing at least one image of the raster deformed by the measured substrate, a raster lighting system, and an image-processing and digital analysis mechanism connected to the video camera. The video camera is a matrix array camera, the raster is provided on a substrate having an oblong shape and is bidirectional including a first pattern extending along a first direction and along a smallest extension of the substrate, the first pattern being transversely periodical to the smallest extension, and a second pattern extending in a second direction perpendicular to the first pattern and along a largest extension of the substrate.
公开/授权文献
- US20110187855A1 DEVICE FOR ANALYSING THE SURFACE OF A SUBSTRATE 公开/授权日:2011-08-04
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