发明授权
- 专利标题: Method and apparatus to allow a plurality of stages to operate in close proximity
- 专利标题(中): 允许多个台阶靠近操作的方法和装置
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申请号: US13526994申请日: 2012-06-19
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公开(公告)号: US09030057B2公开(公告)日: 2015-05-12
- 发明人: Michael B. Binnad , Pai-Hsueh Yang
- 申请人: Michael B. Binnad , Pai-Hsueh Yang
- 申请人地址: JP Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JP Tokyo
- 主分类号: H02K41/02
- IPC分类号: H02K41/02 ; G03F7/20 ; H02K41/03 ; H02K3/47
摘要:
According to one aspect of the present invention, a stage apparatus includes a first stage, a first magnet arrangement, and a stator arrangement that includes a first coil having a first width. The first magnet arrangement is associated with the first stage, and includes a first quadrant and a second quadrant or, more generally, a first sub-array and a second sub-array. The first quadrant has at least one first magnet arranged parallel to a first axis, and the second quadrant has at least one second magnet arranged parallel to a second axis. The first quadrant is adjacent to the second quadrant relative to the first axis, and is spaced apart from the second quadrant by a distance relative to the second axis. The stator arrangement is configured to cooperate with the first magnet arrangement to drive the first stage.
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