发明授权
- 专利标题: Adjusting device of wafer machine
- 专利标题(中): 晶圆机的调整装置
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申请号: US13234156申请日: 2011-09-16
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公开(公告)号: US09016676B2公开(公告)日: 2015-04-28
- 发明人: Yung-Chiu Huang
- 申请人: Yung-Chiu Huang
- 代理商 Leong C. Lei
- 主分类号: B23Q1/25
- IPC分类号: B23Q1/25 ; B23Q3/18 ; B25B1/20 ; B23Q1/64 ; B23Q35/46
摘要:
The present invention relates to an adjusting device of wafer machine, which includes a rotary adjustment assembly that is rotatable to cause the rotation of a rod so as to displace a support block thereby elevating or lowering a support post. A balance board is thus caused to move a wafer substrate so as to realize balancing of wafer through the support post, whereby efficient adjustment of the wafer machine to a balanced position can be achieved without extra expense of time in adjustment operation and thus accelerating the time of manufacturing process and providing extremely high precision and further effectively reducing the potential risk of damage caused by over-adjustment.
公开/授权文献
- US20130069295A1 ADJUSTING DEVICE OF WAFER MACHINE 公开/授权日:2013-03-21
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