发明授权
- 专利标题: Method for growing group III nitride crystal
- 专利标题(中): 生长III族氮化物晶体的方法
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申请号: US13115560申请日: 2011-05-25
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公开(公告)号: US09005362B2公开(公告)日: 2015-04-14
- 发明人: Yuki Hiromura , Koji Uematsu , Hiroaki Yoshida , Shinsuke Fujiwara
- 申请人: Yuki Hiromura , Koji Uematsu , Hiroaki Yoshida , Shinsuke Fujiwara
- 申请人地址: JP Osaka-shi, Osaka
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka-shi, Osaka
- 代理机构: Drinker Biddle & Reath LLP
- 优先权: JP2010-174534 20100803
- 主分类号: C30B21/02
- IPC分类号: C30B21/02 ; H01L21/02 ; C30B25/18 ; C30B29/40
摘要:
The present invention is to provide a method for growing a group III nitride crystal that has a large size and has a small number of pits formed in the main surface of the crystal by using a plurality of tile substrates. A method for growing a group III nitride crystal includes a step of preparing a plurality of tile substrates 10 including main surfaces 10m having a shape of a triangle or a convex quadrangle that allows two-dimensional close packing of the plurality of tile substrates; a step of arranging the plurality of tile substrates 10 so as to be two-dimensionally closely packed such that, at any point across which vertexes of the plurality of tile substrates 10 oppose one another, 3 or less of the vertexes oppose one another; and a step of growing a group III nitride crystal 20 on the main surfaces 10m of the plurality of tile substrates arranged.
公开/授权文献
- US20120031324A1 METHOD FOR GROWING GROUP III NITRIDE CRYSTAL 公开/授权日:2012-02-09
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