发明授权
US08982322B2 Exposure apparatus and device manufacturing method 有权
曝光装置和装置制造方法

  • 专利标题: Exposure apparatus and device manufacturing method
  • 专利标题(中): 曝光装置和装置制造方法
  • 申请号: US11717748
    申请日: 2007-03-14
  • 公开(公告)号: US08982322B2
    公开(公告)日: 2015-03-17
  • 发明人: Hiroyuki Nagasaka
  • 申请人: Hiroyuki Nagasaka
  • 申请人地址: JP Tokyo
  • 专利权人: Nikon Corporation
  • 当前专利权人: Nikon Corporation
  • 当前专利权人地址: JP Tokyo
  • 代理机构: Oliff PLC
  • 优先权: JP2006-074243 20060317
  • 主分类号: G03B27/42
  • IPC分类号: G03B27/42 G03F7/20
Exposure apparatus and device manufacturing method
摘要:
An exposure apparatus provided with an optical system that has one optical element to which at least two of three or more exposure lights are guided, and that is capable of irradiating three or more exposure lights onto exposure fields that respectively correspond to the exposure lights, with the exposure apparatus multiply exposing a predetermined field on a substrate with images of a plurality of patterns that are formed based on the three or more exposure lights that are respectively irradiated onto the three or more exposure fields.
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