发明授权
- 专利标题: Device to detect thermal radiation with high resolution method to manufacture and use the device
- 专利标题(中): 以高分辨率方式检测热辐射的装置制造和使用该装置
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申请号: US12680286申请日: 2008-09-29
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公开(公告)号: US08969811B2公开(公告)日: 2015-03-03
- 发明人: Carsten Giebeler , Matthias Schreiter , Uwe Rettig
- 申请人: Carsten Giebeler , Matthias Schreiter , Uwe Rettig
- 申请人地址: GB Edinburgh
- 专利权人: Pyreos Ltd.
- 当前专利权人: Pyreos Ltd.
- 当前专利权人地址: GB Edinburgh
- 代理机构: Edell, Shapiro & Finnan, LLC
- 优先权: DE102007046451 20070928
- 国际申请: PCT/EP2008/008280 WO 20080929
- 国际公布: WO2009/043571 WO 20090409
- 主分类号: G01J5/02
- IPC分类号: G01J5/02 ; H01L31/101 ; G01J5/04 ; G01J5/06 ; G01J5/34 ; H01L37/02
摘要:
A device to detect thermal radiation has a membrane and at least two detector elements that are respectively set up to transduce thermal radiation into an electrical signal and are mounted situated next to one another on the membrane, wherein at least one heat dissipation path is provided on the side of the membrane facing towards the detector elements and/or on the side of the membrane facing away from the detector elements, which heat dissipation path has a higher heat conductivity than the membrane and is connected with the detector elements in a heat-conductive manner via the membrane so that heat can be discharged from the detector elements with the heat dissipation path, whereby the response time of the detector elements is short; and wherein at least one heat barrier that has a lower heat conductivity than the membrane and extends between the detector elements is provided integrated into the membrane, such that a heat conduction in the membrane from the one detector element to the other detector element is prevented by the heat barrier; whereby the crosstalk of the detector elements is low.
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